FinFET devices for VLSI circuits and systems / Samar K. Saha.Material type: TextPublisher: Boca Raton : CRC Press, 2020Edition: First editionDescription: 1 online resourceContent type:
- online resource
- 621.39/5 23
"To surmount the continuous scaling challenges of MOSFET devices, FinFETs have emerged as the real alternative for use as the next generation device for IC fabrication technology. The objective of the book is to provide the basic theory and operating principles of FinFET devices and technology, an overview of FinFET device architecture and manufacturing processes, detailed formulation of FinFET electrostatic and dynamic device characteristics for IC design and manufacturing. Thus, this book caters to practicing engineers transitioning to FinFET technology and prepares the next generation device engineers and academic experts on mainstream device technology at the nanometer-nodes"-- Provided by publisher.
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